General Sequence of Operation
- Initially, a teach file is generated from tool CAD data
- Sensor carrier is placed on the end effector
- Robot moves to dedicated position and verifies position relative to EE
- Robot begins the auto teaching process
- Robot moves to each pick/place position and senses location
- Position offsets are calculated and new positions stored in controller
Auto Teaching Solutions for Any Application
Solutions for 200/300/450mm & Custom Applications
- Standard Sensor Carriers suitable for any robot system handling 200mm, 300mm or 450mm wafers
- Interchangeable between different tools by using cassettes (FOUPs)
- Wirelessly charged, either inside of the tool (automatically) or outside (manually)
- Controlled by either Robot Controller, Tool Controller or Hand Held Unit
- Graphical User Interface for easy set-up and operation
Suitable for any robot system handling round or square substrates (wafer, reticles, LCD or Solar panels, etc.)
Based on a sensor carrier, shaped as the substrate, with wireless connection to the robot controller
Complete automatic re-teaching at any time: only during first tool set-up the sensor carrier has to be placed once manually on the robot end effector.