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Available EFEMs:
- integrated Front End Module
- Standard Front End Modules
- N2 Front End Modules
- Vacuum Platforms
integrated Front End Module
- Concept
- Turn-key Front End Handling unit incorporated into Process Tool
- Handling Robot, Load Ports and Accessories integrated into a single solution
- Advantages
- Cost Savings - iFEM and process tool share same mini-environment, safety features and offer a reduced footprint.
- Highly Flexible Design - which easily meets customer requirements.
- High Reliability and Performance - using Sinfonia Technology's & Sankyo's standard handling products.
We now offer a turn-key front-end handling solution for process equipment that utilizes Sinfonia Technology's load ports as well as Sankyo robotics and accessories. Both companies provide a rich portfolio of handling solutions which can be integrated into our iFEM, offering cost savings, common safety features, high reliability and a multitude of configurations, all while reducing your front-end footprint.